# Kovar, PEEK & Vacuum Components for Semiconductor Equipment – Application Case > Components for semiconductor and vacuum equipment: chamber parts in 6061/316, CF flanges in 316LN, Kovar 4J29 and PEEK machined parts. Low-volume, high-precision batches from 50 pieces. https://www.sinbo-machining.com/case/semiconductor-vacuum-parts/ --- ## On This Page - Typical component families - Typical supply parameters - Parameter Quick Reference - Industry scenario: low volumes, exotic materials, zero tolerance for shortcuts - Typical component families and processes - Workflow: drawing, sample approval and recurring series - Quality and documentation - FAQ - Related Materials · Related Services · Related Case Studies - Planning components like these? # Kovar, PEEK & Vacuum Components for Semiconductor Equipment Components for semiconductor and vacuum equipment: chamber parts in 6061/316, CF flanges in 316LN, Kovar 4J29 and PEEK machined parts. Low-volume, high-precision batches from 50 pieces. Application at a glance ### Typical component families | Vacuum chamber parts | 6061 aluminum, 316, milled | CF flanges | 316LN, turned | Kovar parts, PEEK parts | 4J29, PEEK, turned/milled ### Typical supply parameters | Batch range | 50–5,000 pcs per family | Tolerance scheme | DIN ISO 2768-mK, seal surfaces to drawing | Documentation | EN 10204 3.1, material certificates ## Parameter Quick Reference | Parameter | Specification | Component families | Vakuumkammer-Komponenten (vacuum chamber components); CF-Flansche (CF flanges); Kovar-Teile (Kovar parts); PEEK-Komponenten (PEEK components) | Typical materials | 6061 aluminum, 316; 316LN; Kovar 4J29; PEEK | Machining processes | milling; turning; Swiss-type turning; turn-milling | Typical batch sizes | 50–5,000 pcs per family | Default tolerance scheme | DIN ISO 2768-mK, seal surfaces to drawing | Material certificates | EN 10204 3.1, material certificates | Inspection requirement | first article inspection | Quotation and sample lead time | quotation within 48 hours; first samples in 7–15 days ## Industry scenario: low volumes, exotic materials, zero tolerance for shortcuts Semiconductor and vacuum equipment builders order small batches of high-precision components — vacuum chamber parts, CF flanges, feedthrough components — where the differentiator is not volume pricing but rare material capability and process discipline. Kovar (4J29) for glass-to-metal seals and PEEK for insulating, outgassing-critical parts are the two materials that most shops avoid. Both are established in our portfolio. Kovar turning requires controlled cutting conditions to preserve the seal-surface quality; PEEK machining needs thermal management to hold dimensions on an insulating material. Batches from 50 pieces fit the equipment-builder pattern. ## Typical component families and processes | Component (DE / EN) | Typical material | Process | Typical batch | Vakuumkammer-Komponenten (vacuum chamber components) | 6061 aluminum, 316 | milling | 50–1,000 pcs | CF-Flansche (CF flanges) | 316LN | turning | 100–2,000 pcs | Kovar-Teile (Kovar parts) | Kovar 4J29 | Swiss-type turning | 500–5,000 pcs | PEEK-Komponenten (PEEK components) | PEEK | turn-milling | 200–2,000 pcs Kovar and PEEK machining are differentiating capabilities in this vertical — both are established processes with controlled cutting parameters. ## Workflow: drawing, sample approval and recurring series The standard flow: drawing review and quotation within 48 hours, first samples in 7–15 days, first article inspection and approval, then series production against the approved reference. Batch sizes follow the table above — from single spare parts to tens of thousands of pieces per order, depending on the component family. For repeat orders, tooling, program revisions and inspection records are kept on file, so call-offs remain consistent with the approved first article. Engineering changes — material substitutions, tolerance updates, packaging changes — are handled as controlled changes against the same records. ## Quality and documentation DIN ISO 2768-mK applies as the default tolerance scheme for unspecified dimensions. EN 10204 3.1 inspection certificates are standard for metallic parts, First Article Inspection supports the approval step, and RoHS/REACH declarations are available where required. Surface treatment, cleanliness and packaging requirements are confirmed per drawing. ## FAQ Do you machine Kovar (4J29)?Yes — Kovar turning with controlled cutting conditions is an established process, typically for glass-to-metal seal components. Can you machine PEEK without losing dimensions?Yes — PEEK machining requires thermal management; dimensional strategy is agreed per drawing before sampling. What CF flange finishes do you deliver?Seal surfaces are machined to the drawing specification for the flange size; values are confirmed before production. What batch sizes fit equipment builders?50–1,000 pieces for chamber components, up to 5,000 for Kovar and PEEK part families. ### Related Materials · Related Services · Related Case Studies [Related Materials: Titanium ](https://www.sinbo-machining.com/products/materials/titanium/)[· Plastic ](https://www.sinbo-machining.com/products/materials/plastic/)[Related Services: Cnc Machining ](https://www.sinbo-machining.com/services/cnc-machining/)[Related Case Studies: High Tech Semicon ](https://www.sinbo-machining.com/case/high-tech-semicon/)[· Vacuum Chamber Flange ](https://www.sinbo-machining.com/case/vacuum-chamber-flange/)This page describes a representative application scenario for the semiconductor and vacuum equipment manufacturing industry, compiled from typical requirements of this vertical. It is not tied to any specific customer or order; series quantities, materials and tolerances are confirmed per drawing for each enquiry. ## Planning components like these? Send your drawing — Sinbo Precision will review material, tolerance scheme and batch plan and return a quotation within 48 hours. Samples in 7–15 days. [Get a Quote in 48 Hours ](https://www.sinbo-machining.com/quote/)